Application of CYLEX Seal in the Field of Semiconductor Industry
CYLEX Seal produces high-reliability seals for the semiconductor industry, semiconductor applications, and the broader electronics industry. We provide high specification customized semiconductor seals and gaskets, which can provide comprehensive protection for air, water, dust, oil and EMI/RFI. The commonly used materials are PTFE, PVDF, PEEK, PEI, PI, etc.
Application of semiconductor equipment sealing solutions
● Sputtering chamber
● Sliced wafer
● Etching machine
● High temperature door seal
● Vacuum pump
● Dosing equipment
● Offset printing
● Crystal growth chamber
● Dry plasma etching
● Resist stripping
Aviation sealing system application
● Perfluoroelastomer O-ring
● Engineering plastic seal
● EMI gasket
● Radiation protection polymer seal
● PVDF test stand
Application case study 1: Adhesive door seal
Problem: The standard O-ring profile installed in the traditional groove shape generates a lot of particles and eventually leads to pollution.
Reason: The O-ring installed in the dovetail groove of the gate valve or slit valve has “dead corners” in the groove. Over time, particles produced by application wear will accumulate in this dead space, causing contamination to enter the deposition chamber.
Solution: Molding the same O-ring elastomer into the gate can remove the O-ring groove and the corresponding dead angle. The profile also improves the wear characteristics of the seal and extends the life and time between maintenance.
