High-Purity PFA Diaphragm Regulator
Ensure Process Purity with CYLEX PFA Regulators. Engineered for the most demanding applications, our High-Purity PFA Diaphragm Regulators provide exceptional corrosion resistance and minimal particle generation. Guarantee consistent performance with ultra-pure media like HCl, H2SO4, SEMI-Chemicals, and DI Water. Trusted in Semiconductor, Pharma, and Analytical Industries.
Model: D-F-ARV40-G204-4-FA
Product Name: Pneumatic Pressure Reducing Valve
Port Size: 1/4″
Mounting Method: Threaded Flange
Body Material: Ultra-pure PFA
CYLEX supports small-batch customization, offers discounts for large quantities, fast delivery, and provides guaranteed after-sales service.
Get a quote or inquire for more information about custom processing of PFA Valves .
Processing Cycle:
7-14 days
Material:
Diaphragm: PTFE
Valve body: PFA
Inquiry NowPFA Valve Catalog (PDF)
Categories :
High-Purity PFA Diaphragm Regulator for Aggressive Chemicals & Ultra-Pure Applications
● Designed for High-Purity – Minimal Particle Generation & Leaching
● Stable Pressure Control with High-Flow Capabilities
● Ideal for Semiconductor, Pharmaceutical & Analytical Industries
Precision Pressure Control, Uncompromising Purity
The CYLEX High-Purity PFA Diaphragm Regulator is engineered to meet the stringent demands of industries where process purity and material compatibility are paramount. Constructed with a fully wetted path of high-grade PFA (Perfluoroalkoxy), this regulator excels in handling the most aggressive acids, bases, solvents, and ultra-pure water without risk of contamination or corrosion.
Key Features & Benefits
● Superior Material Compatibility: The all-PFA construction provides exceptional resistance to virtually all aggressive chemicals, including Hydrochloric Acid (HCl), Sulfuric Acid (H2SO4), Hydrogen Peroxide (H2O2), Ammonium Hydroxide, and Bromine.
● Guaranteed Process Purity: Non-metallic, non-contaminating wetted surfaces ensure your sensitive processes remain free from ionic contamination and particles. Perfect for SEMI-grade chemicals and DI water systems.
● Robust & Leak-Free Design: Engineered for durability and safety in the most challenging environments. Features high-integrity seals and a design optimized for long service life.
● Easy Maintenance & Service: Modular design allows for easy disassembly, cleaning, and replacement of internal components, minimizing downtime and total cost of ownership.
Technical Specifications (D-F-ARV40-G204-4-FA):
| Use fluid | Pure water, chemical liquid | ||||||||||
| Fluid temperature | 5~120 °C (Note 1, Note 2) | ||||||||||
| Pressure resistance | 1.0 Mpa | ||||||||||
| Use pressure | A→B: 0~0.5 Mpa B→A: 0~0.5 Mpa | ||||||||||
| Valve seat leakage | 0 cm³/min (Water pressure) | ||||||||||
| Backpressure | 0~0.5Mpa | ||||||||||
| Ambient temperature | 0～60 ℃（With sensor 0〜50 ℃） | ||||||||||
| Material | Diaphragm: PTFE Valve body: PFA | ||||||||||
Note 1: Please use hydrofluoric acid or chemical liquids containing hydrofluoric acid within the range of 5 to 80°C. | |||||||||||
Industries & Applications
● Semiconductor Manufacturing: Chemical delivery systems (CMP, Etch, Clean), UPW/WW treatment, gas abatement.
● Pharmaceutical & Biotech: Process reactors, filtration systems, solvent delivery, CIP/SIP support systems.
● Analytical Chemistry: Regulators for HPLC, ICP-MS, and other instruments requiring ultra-pure carrier gases and reagents.
● Industrial Chemical Processing: Controlled addition of corrosive chemicals in pilot plants and production.
Why Choose CYLEX?
At CYLEX, we specialize in providing high-performance fluid handling solutions. Our PFA Diaphragm Regulator is the result of rigorous engineering and a deep understanding of our clients’ critical needs. We are committed to delivering not just a product, but a reliable component for your success.
Need a Quote or Custom Size? ✉️ Contact CYLEX Today!
Test Type Test Conditions Acceptance Criteria Test Results Burst pressure Hydraulic oil pressure builds up until a leak is detected The burst pressure must be greater than 2 times the rated pressure PASS Pressure envelope 414kPa (60psig)@180°C and 310kPa (45psig)@200°C thermal oil 1 million cycles at 1.5 times rated pressure without external leakage PASS No external leakage Drive cycle test 276kPa (40psig)@180°C and 207kPa (30psig)@200°C thermal oil cycle 500,000 times Functional performance up to 500K cycles without leakage in normally open valves PASS No external or port-to-port leakage <0.050 cc H₂O/hr 276 kPa (40 psig)@180°C and 207 kPa (30 psig)@200°C thermal oil 1 million cycles Functional performance up to 1 million cycles without leakage in normally closed valves PASS No external or port-to-port leakage <0.050 cc H₂O/hr Test Type Test Conditions Acceptance Criteria External medium leakage 552kPa (80psig) CDA Through 1/32″ ID tubing immersed in DI water, no bubbles per minute Port to Port Valve Testing 552kPa (80psig) CDA to valve outlet Less than 4 bubbles per minute through 1/32″ ID tubing immersed in DI water Valve drive Pressure decay 552kPa (80psig) CDA Pressure drop less than 7 kPa (1 psig/min)
Naming Convention
Pneumatic PFA Diaphragm Valve Model Indication and Model Selection
Surface Roughness Specifications & Surface Extractability Specifications
Surface roughness
Surface roughness specification
Surface roughness specification Component Description SEMI F57 0622 Recommended value Ra (µm) Typical test results Ra (µm) Injection molded valve body ≤0.35 ≤0.30 Machine-machined PTFE diaphragm ≤0.35 ≤0.20 Injection molded fitting flow path ≤0.35 ≤0.25 Machine-machined PFA valve body ≤0.60 ≤0.30 Machine-machined PTFE valve body ≤0.60 ≤0.40 Surface extractable specifications
The test liquid used was ultrapure water and the test was carried out at 85°C. The parts were leached after the prescribed rinsing pretreatment. The immersion time was 7 days.
Extractable ionic contamination
Surface extractable ionic contamination
Surface extractable ionic contamination Ion types SEMI F57 0622 Recommended value (µg/m³) Typical product measurement values (ultrapure water 85°C+5°C, 7-day leaching value) (µg/m³) Ammonium ions NH4+ ≤100 <0.1 Bromide ions Br− ≤100 <0.1 Chloride ions Cl− ≤100 <3 Fluoride ions F− ≤20000 <133 Nitrate ions NO3 ≤100 <0.1 Nitrite ions NO2 ≤100 <0.1 Phosphate ions PO42− ≤100 <0.1 Sulfate ions SO42− ≤100 <0.1 Extractable Metal Contamination
Surface extractable metal contaminants
Surface extractable metal contaminants Test items (tcp-ms) SEMI F57 0622 Recommended value (μg/m²) Typical product measurement values (ultrapure water 85°C + 5°C, 7-day leaching value) (μg/m²) Aluminum AI ≤5 <0.2 Arsenic AS ≤2 <0.1 Antimony Sb ≤2 <0.1 Barium Ba ≤15 <0.2 Boron B3 ≤30 <0.5 Cadmium Cd ≤2 <0.01 Calcium Ca ≤10 <0.21 Chromium Cr ≤1 <0.2 Copper Cu ≤10 <0.2 Iron Fe ≤5 <0.2 Lead Pb ≤1 <0.05 Lithium Li ≤2 <0.2 Magnesium Mg ≤2 <0.2 Manganese Mn ≤5 <0.2 Nickel Ni ≤1 <0.2 Potassium K ≤10 <0.5 Sodium Na ≤10 <0.5 Strontium Sr ≤0.5 <0.05 Titanium Ti ≤2 <0.1 Tin Sn ≤2 <0.1 Vanadium V ≤2 <0.01 Zinc Zn ≤5 <0.2
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