PFA Compact Elbow Fitting (Equal Diameter) is a PFA equal diameter elbow designed for high-purity, corrosion-resistant fluid systems. Features include:
Material Performance: Strong acid/alkali resistance, high temperature resistance (-200°C to 260°C), smooth interior, suitable for the semiconductor, chemical, and pharmaceutical industries.
Structure: Equal diameter, compact design saves space. Available in sizes from 1/4″ to 2″ for common 90°/45° elbows.
Advantages: Lightweight and low extractables.
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| PartNo. | Tube O.D. | Office (mm) | A (mm) | B (mm) | |||||
|---|---|---|---|---|---|---|---|---|---|
| D-G1-UE4S-4S-FA | 1/4″ | 3.8 | 41.5 | 15.4 | |||||
| D-G1-UE6S-6S-FA | 3/8″ | 6.3 | 44 | 17.1 | |||||
| D-G1-UE8S-8S-FA | 1/2″ | 9.6 | 49.5 | 18.1 | |||||
| D-G1-UE12S-12S-FA | 3/4″ | 16 | 54 | 29.2 | |||||
| D-G1-UE16S-16S-FA | 1″ | 22.3 | 69.5 | 33.2 | |||||
| D-G1-UE20S-20S-FA | 1-1/4″ | 27.9 | 78.5 | 43.1 | |||||
● Wetted parts: Ultrapure PFA. ● Nut: Ultrapure PFA. ● Maximum working pressure: 125 PSIG (8.6 bar), see pressure/temperature table. ● Operating temperature range: -18℃~200℃, 1½ and above specifications are recommended to be used at a temperature below 150°C. | |||||||||
● Material: PFA (perfluoroalkoxy resin), offering excellent chemical inertness and resistance to strong acids, strong bases, organic solvents, and high-purity applications.
● Structure: Equal-diameter design (same diameter at both ends), compact (small bend radius, saving space).
● Applicable Environment: High temperature (-200°C to +260°C) and high pressure (depending on specifications). Commonly used in the semiconductor, photovoltaic, chemical, and pharmaceutical industries.
● Semiconductor manufacturing: Transport of high-purity chemicals (e.g., etching solutions, CMP slurries).
● Chemical piping: Transport of corrosive media (e.g., hydrofluoric acid, sulfuric acid, chlorine).
● Biopharmaceuticals: Sterile fluid systems to avoid contamination risks.
● High cleanliness: Smooth interior reduces particle precipitation.
● Corrosion resistance: Superior to materials like stainless steel and PTFE.
● Lightweight: Easier to install than metal elbows.
| Surface roughness specification | ||
|---|---|---|
| Component Description | SEMI F57 0622 Recommended value Ra (µm) | Typical test results Ra (µm) |
| Injection molded valve body | ≤0.35 | ≤0.30 |
| Machine-machined PTFE diaphragm | ≤0.35 | ≤0.20 |
| Injection molded fitting flow path | ≤0.35 | ≤0.25 |
| Machine-machined PFA valve body | ≤0.60 | ≤0.30 |
| Machine-machined PTFE valve body | ≤0.60 | ≤0.40 |
The test liquid used was ultrapure water and the test was carried out at 85°C. The parts were leached after the prescribed rinsing pretreatment. The immersion time was 7 days.
| Ion types | SEMI F57 0622 Recommended value (µg/m³) | Typical product measurement values (ultrapure water 85°C+5°C, 7-day leaching value) (µg/m³) |
|---|---|---|
| Ammonium ions NH4+ | ≤100 | <0.1 |
| Bromide ions Br− | ≤100 | <0.1 |
| Chloride ions Cl− | ≤100 | <3 |
| Fluoride ions F− | ≤20000 | <133 |
| Nitrate ions NO3 | ≤100 | <0.1 |
| Nitrite ions NO2 | ≤100 | <0.1 |
| Phosphate ions PO42− | ≤100 | <0.1 |
| Sulfate ions SO42− | ≤100 | <0.1 |
| Surface extractable metal contaminants | ||
|---|---|---|
| Test items (tcp-ms) | SEMI F57 0622 Recommended value (μg/m²) | Typical product measurement values (ultrapure water 85°C + 5°C, 7-day leaching value) (μg/m²) |
| Aluminum AI | ≤5 | <0.2 |
| Arsenic AS | ≤2 | <0.1 |
| Antimony Sb | ≤2 | <0.1 |
| Barium Ba | ≤15 | <0.2 |
| Boron B3 | ≤30 | <0.5 |
| Cadmium Cd | ≤2 | <0.01 |
| Calcium Ca | ≤10 | <0.21 |
| Chromium Cr | ≤1 | <0.2 |
| Copper Cu | ≤10 | <0.2 |
| Iron Fe | ≤5 | <0.2 |
| Lead Pb | ≤1 | <0.05 |
| Lithium Li | ≤2 | <0.2 |
| Magnesium Mg | ≤2 | <0.2 |
| Manganese Mn | ≤5 | <0.2 |
| Nickel Ni | ≤1 | <0.2 |
| Potassium K | ≤10 | <0.5 |
| Sodium Na | ≤10 | <0.5 |
| Strontium Sr | ≤0.5 | <0.05 |
| Titanium Ti | ≤2 | <0.1 |
| Tin Sn | ≤2 | <0.1 |
| Vanadium V | ≤2 | <0.01 |
| Zinc Zn | ≤5 | <0.2 |
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