Semiconductor Grade PFA Diaphragm Valve
CYLEX Semiconductor Grade PFA Diaphragm Valve: Engineered for Yield-Critical Applications
Meet the precision and purity standards of modern semiconductor fabs with the CYLEX Semiconductor Grade PFA Diaphragm Valve. Specifically designed for ultra-pure water (UPW), aggressive chemical slurries, and high-purity gas systems, this valve guarantees ultra-low ionic and particulate extractables. Its full PFA wetted-path construction ensures unmatched corrosion resistance and prevents metallic contamination, safeguarding your process integrity and maximizing yield.
Model: D-F-MDV4-G112-01A4-FA
Body Size: 46mm
Connector Type: Flare
Port Size: 3/4″
Actuator Options: Open/Close Only
Control Port Direction: Same as fluid flow
Mounting Method: Threaded Flange
Body Material: Ultra-pure PFA
CYLEX supports small-batch customization, offers discounts for large quantities, fast delivery, and provides guaranteed after-sales service.
Get a quote or inquire for more information about custom processing of PFA Valves .
Processing Cycle:
7-14 days
Material:
Diaphragm: PTFE
Valve body: PFA
Inquiry NowPFA Valve Catalog (PDF)
Categories :
Semiconductor Grade PFA Diaphragm Valve – For Yield and Contamination Control
In the precision-driven world of semiconductor manufacturing, every component must contribute to contamination control. The CYLEX Semiconductor Grade PFA Diaphragm Valve is not just a valve; it’s a critical component of your yield assurance strategy. Engineered from the ground up to meet and exceed the stringent requirements of front-end wafer fabrication, it delivers unparalleled performance in handling ultra-pure water and the most aggressive high-purity chemicals.
Designed to Protect Your Process and Your Yield
● Ultra-Low Extractables Guaranteed: Our valves are manufactured and tested to ensure minimal release of metallic ions and particles. This is critical for preventing device defects and maintaining high yields in sub-nanometer processes.
● Full PFA Fluid Path for Maximum Purity: Every wetted component is crafted from high-purity, contamination-free PFA material. This eliminates the risk of metallic contamination from the valve itself, ensuring the integrity of your sensitive fluids.
● Zero Dead Space Design: The optimized weir and body design creates a smooth, uninterrupted flow path. This prevents fluid entrapment, reduces particle shedding, and allows for efficient cleaning and rapid purging, minimizing downtime.
● Hermetic Diaphragm Seal: The PTFE diaphragm acts as a perfect barrier, completely isolating the fluid from the actuator mechanism. This design eliminates any possibility of leakage to the atmosphere or external contamination ingress, a non-negotiable feature in tool hook-up and chemical delivery systems.
Technical Specifications (D-F-MDV4-G112-01A4-FA):
| Use fluid | Pure water, chemical liquid | ||||||||||
| Fluid temperature | 5~120 °C (Note 1, Note 2) | ||||||||||
| Pressure resistance | 1.0 Mpa | ||||||||||
| Use pressure | A→B: 0~0.5 Mpa B→A: 0~0.5 Mpa | ||||||||||
| Valve seat leakage | 0 cm³/min (Water pressure) | ||||||||||
| Backpressure | 0~0.5Mpa | ||||||||||
| Ambient temperature | 0～60 ℃ | ||||||||||
| Diameter | Φ16 | ||||||||||
| Material | Diaphragm: PTFE Valve body: PFA | ||||||||||
Note 1: Please use hydrofluoric acid or chemical liquids containing hydrofluoric acid within the range of 5 to 80°C. | |||||||||||
Targeted Semiconductor Applications
● Ultra-Pure Water (UPW) Distribution Systems
● Chemical Mechanical Planarization (CMP) Slurry & Chemistry
● Wet Etch & Clean Stations (e.g., SC1, SC2, HF, H3PO4)
● Lithography Process Tools
● Diffusion & Implantation Tool Hook-up
● High-Purity Bulk Gas and Chemical Delivery Systems (CDS)
Why CYLEX is Your Trusted Partner in the Fab
● Deep Industry Understanding: We speak your language. Our engineering team understands the critical nature of contamination control in semiconductor processes.
● Rigorous Quality Assurance: Every valve undergoes a battery of tests, including helium leak tests and cleanroom particle counts, with full traceability.
● Technical Support: We provide unparalleled technical data and support to help you integrate our products seamlessly into your system.
● Global Supply Chain Reliability: CYLEX ensures consistent quality and on-time delivery to support your production schedules.
Safeguard Your Yield with Precision-Engineered Fluid Solutions. Contact the CYLEX team today to request a detailed technical data sheet, a comprehensive extractables test report, or to schedule a technical consultation with our engineers.
Need a Quote or Custom Size? ✉️ Contact CYLEX Today!
Test Type Test Conditions Acceptance Criteria Test Results Burst pressure Hydraulic oil pressure builds up until a leak is detected The burst pressure must be greater than 2 times the rated pressure PASS Pressure envelope 414kPa (60psig)@180°C and 310kPa (45psig)@200°C thermal oil 1 million cycles at 1.5 times rated pressure without external leakage PASS No external leakage Drive cycle test 276kPa (40psig)@180°C and 207kPa (30psig)@200°C thermal oil cycle 500,000 times Functional performance up to 500K cycles without leakage in normally open valves PASS No external or port-to-port leakage <0.050 cc H₂O/hr 276 kPa (40 psig)@180°C and 207 kPa (30 psig)@200°C thermal oil 1 million cycles Functional performance up to 1 million cycles without leakage in normally closed valves PASS No external or port-to-port leakage <0.050 cc H₂O/hr Test Type Test Conditions Acceptance Criteria External medium leakage 552kPa (80psig) CDA Through 1/32″ ID tubing immersed in DI water, no bubbles per minute Port to Port Valve Testing 552kPa (80psig) CDA to valve outlet Less than 4 bubbles per minute through 1/32″ ID tubing immersed in DI water Valve drive Pressure decay 552kPa (80psig) CDA Pressure drop less than 7 kPa (1 psig/min)
Naming Convention
Pneumatic PFA Diaphragm Valve Model Indication and Model Selection
Surface Roughness Specifications & Surface Extractability Specifications
Surface roughness
Surface roughness specification
Surface roughness specification Component Description SEMI F57 0622 Recommended value Ra (µm) Typical test results Ra (µm) Injection molded valve body ≤0.35 ≤0.30 Machine-machined PTFE diaphragm ≤0.35 ≤0.20 Injection molded fitting flow path ≤0.35 ≤0.25 Machine-machined PFA valve body ≤0.60 ≤0.30 Machine-machined PTFE valve body ≤0.60 ≤0.40 Surface extractable specifications
The test liquid used was ultrapure water and the test was carried out at 85°C. The parts were leached after the prescribed rinsing pretreatment. The immersion time was 7 days.
Extractable ionic contamination
Surface extractable ionic contamination
Surface extractable ionic contamination Ion types SEMI F57 0622 Recommended value (µg/m³) Typical product measurement values (ultrapure water 85°C+5°C, 7-day leaching value) (µg/m³) Ammonium ions NH4+ ≤100 <0.1 Bromide ions Br− ≤100 <0.1 Chloride ions Cl− ≤100 <3 Fluoride ions F− ≤20000 <133 Nitrate ions NO3 ≤100 <0.1 Nitrite ions NO2 ≤100 <0.1 Phosphate ions PO42− ≤100 <0.1 Sulfate ions SO42− ≤100 <0.1 Extractable Metal Contamination
Surface extractable metal contaminants
Surface extractable metal contaminants Test items (tcp-ms) SEMI F57 0622 Recommended value (μg/m²) Typical product measurement values (ultrapure water 85°C + 5°C, 7-day leaching value) (μg/m²) Aluminum AI ≤5 <0.2 Arsenic AS ≤2 <0.1 Antimony Sb ≤2 <0.1 Barium Ba ≤15 <0.2 Boron B3 ≤30 <0.5 Cadmium Cd ≤2 <0.01 Calcium Ca ≤10 <0.21 Chromium Cr ≤1 <0.2 Copper Cu ≤10 <0.2 Iron Fe ≤5 <0.2 Lead Pb ≤1 <0.05 Lithium Li ≤2 <0.2 Magnesium Mg ≤2 <0.2 Manganese Mn ≤5 <0.2 Nickel Ni ≤1 <0.2 Potassium K ≤10 <0.5 Sodium Na ≤10 <0.5 Strontium Sr ≤0.5 <0.05 Titanium Ti ≤2 <0.1 Tin Sn ≤2 <0.1 Vanadium V ≤2 <0.01 Zinc Zn ≤5 <0.2
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